#ULTRASONIC PIEZO MOTOR TRIAL#

Yan, Complementary inchworm actuator for high-force, high-precision applications. Yan, Closed-loop control of a complementary clamp piezoworm actuator. Spanner, Survey of the various operating principles of ultrasonic piezomotors, in Proceedings of the 10th International Conference on New Actuators, June 2006 (2012 International Conference and Exposition on Electrical and Power Engineering (EPE 2012), 25–27 October, Iasi, Romania)

Filipiuc, A general view on the classification and operating principle of piezoelectric ultrasonic motors. Kumada, A piezoelectric ultrasonic motor. Patent and Trademark Office, Washington, DC, 1985)Ī. Sashida, Motor device utilizing ultrasonic oscillation.

#ULTRASONIC PIEZO MOTOR TRIAL#

Sashida, Trial construction and operation of an ultrasonic vibration driven motor. Patent and Trademark Office, Washington, DC, 1980)

IBM Technical Disclosure Bulletin 16(7), 2263 (1973) Uchino, Piezoelectric ultrasonic motors: overview. Wallaschek, Piezoelectric ultrasonic motors. Wallaschek, Ultrasonic motor research in Germany-past, present, future, in Proceedings of the First International Workshop on Ultrasonic Motors and Actuators (2005) Wallaschek, A piezoelectrically driven wire feeding system for high performance wedge-wedge-bonding machines. Hu, Dynamic modeling of hysteresis in piezoceramics, in Proceedings of IEEE/ASME International Conference on Advanced Intelligent Mechatronics, vol. Leo, A brief review of actuation at the micro-scale using electrostatics, electromagnetics and piezoelectric ultrasonics. Ben-Mrad, A 3-DOF MEMS electrostatic piston-tube actuator. Yeo, Piezoelectric ultrasonic micro/milli-scale actuators. Zhao, Ultrasonic Motors: Technologies and Applications (Springer, Berlin, 2011)ī. Zhu, Developing a linear piezomotor with nanometer resolution and high stiffness. Youm, On the coarse/fine dual-stage manipulators with robust perturbation compensator, in Proceedings of IEEE International Conference on Robotics and Automation, vol. Youm, Robust and time-optimal control strategy for coarse/fine dual-stage manipulators, in Proceedings of IEEE International Conference on Robotics and Automation, vol. Yen, Servo system design of a high-resolution piezo-driven fine stage for step-and repeat microlithography systems, in Proceedings of Annual Conference of Industrial Electronics Society, vol. Tomizuka, Robust controller design for a dual-stage positioning system, in Proceedings of International Conference on Industrial Electronics, Control, and Instrumentation, vol. Okazaki, Precision positioning control apparatus and precision positioning control method. Future development of these technologies is also briefly discussed addressing issues such as increasing the output power, the efficiency, and further miniaturization of these devices. These include a piezoworm stage and a USM with segmented electrodes.

Two examples of piezoelectric motors are discussed in detail. Several designs from the literature and commercial suppliers are reviewed and their characteristics are presented. In this chapter, these motors are classified into quasistatic and ultrasonic motors (USMs) based on their working frequency. Piezoelectric motors use actuators that take advantage of the converse piezoelectric effect. This is due to their unique characteristics including their very high accuracy and short response time as compared to electromagnetic based motors and actuators and higher output force compared to electrostatic actuators. Piezoelectric actuators are increasingly used in various nanopositioning applications and emerging applications where miniaturization is important.

Ultrasonic piezo motor